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conference paper
Patterned Thick Photoresist Layers for Protection of Protruding Structures During Wet and Dry Etching Processes
1997
Micromechanics Europe '97
Type
conference paper
Authors
Publication date
1997
Published in
Micromechanics Europe '97
Start page
39
End page
42
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record