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conference paper
A novel pneumatic actuator system realised by microelectro-discharge machining
1998
MEMS '98 11th Annual International Workshop on Micro Electro Mechanical Systems
Type
conference paper
Authors
Hirata, T.
•
Akashi, T.
•
Bertholds, A.
•
Gruber, H. P.
•
Schmid, A.
•
Grétillat, M.-A.
•
Guenat, O.
•
Publication date
1998
Published in
MEMS '98 11th Annual International Workshop on Micro Electro Mechanical Systems
Start page
160
End page
165
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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