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conference paper
Nonlinear Electromechanical Behavior of an Electrostatic Microrelay
1997
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Type
conference paper
Authors
Grétillat, M.-A.
•
Yang, Y.-J.
•
Hung, E. S.
•
Rabinovich, V.
•
Ananthasuresh, G.-K.
•
•
Senturia, S. D.
Publication date
1997
Published in
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Volume
2
Start page
1141
End page
1144
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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