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conference paper
Electrostatic Polysilicon Microrelays Integrated with MOSFETs
1994
IEEE Micro Electro Mechanical Systems
Type
conference paper
Authors
Publication date
1994
Published in
IEEE Micro Electro Mechanical Systems
Start page
97
End page
101
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record