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conference paper
IC Compatible Electrostatic Polysilicon Microrelays
1994
MME'94 Micromechanics Europe Workshop
Type
conference paper
Authors
Publication date
1994
Published in
MME'94 Micromechanics Europe Workshop
Start page
137
End page
140
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record