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conference paper
Multilayer Polysilicon Resonators Including Shielding for Excitation and Detection
1993
Transducers'93 the 7th Internat. Conf. on Solid-State Sensors and Actuators
Type
conference paper
Authors
Publication date
1993
Published in
Transducers'93 the 7th Internat. Conf. on Solid-State Sensors and Actuators
Start page
292
End page
295
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record