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conference paper
Surface-Micromachined Ta-Si-N Beams for Use in Micromechanics
1997
8th Workshop on Micromachining
Type
conference paper
Authors
Publication date
1997
Published in
8th Workshop on Micromachining
Start page
63
End page
66
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record