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Surface-Micromachined Ta-Si-N Beams for Use in Micromechanics

Grétillat, M.-A. ; Linder, C. ; Dommann, A. ; Staufert, G.[...]

Published in:
8th Workshop on Micromachining, 63-66
Year:
1997
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-03-17


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