Surface-Micromachined Ta-Si-N Beams for Use in Micromechanics
1997
Details
Title
Surface-Micromachined Ta-Si-N Beams for Use in Micromechanics
Author(s)
Grétillat, M.-A. ; Linder, C. ; Dommann, A. ; Staufert, G. ; de Rooij, N. F. ; Nicolet, M. A.
Published in
8th Workshop on Micromachining
Pages
63-66
Date
1997
Laboratories
SAMLAB