Surface-Micromachined Ta-Si-N Beams for Use in Micromechanics
Grétillat, M.-A.; Linder, C.; Dommann, A.; Staufert, G.; de Rooij, N. F.; Nicolet, M. A.
1997

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Title Surface-Micromachined Ta-Si-N Beams for Use in Micromechanics
Author(s) Grétillat, M.-A. ; Linder, C. ; Dommann, A. ; Staufert, G. ; de Rooij, N. F. ; Nicolet, M. A.
Published in 8th Workshop on Micromachining
Pages 63-66
Date 1997
Laboratories SAMLAB
Record Appears in Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published

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