Infoscience

Conference paper

Surface-Micromachined Ta-Si-N Beams for Use in Micromechanics

Grétillat, M.-A.; Linder, C.; Dommann, A.; Staufert, G.; de Rooij, N. F.; Nicolet, M. A.
  • Published in: 8th Workshop on Micromachining, p. 63-66
  • Publication date: 1997

    Reference

    • SAMLAB-CONF-1997-005

    Record created on 2009-05-12, modified on 2016-08-08

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