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research article
Micromechanical relay with electrostatic actuation and metallic contacts
In this paper, an improved design of an electrostatic polysilicon microrelay with metallic contacts is presented. The polysilicon layer is used for the actuator while the nickel and gold layers are used for the contacts. Improved contact resistance is demonstrated, as well as the efficiency of multiple contact bars. Moreover, by integrating nickel bars, electromagnetic actuation was successfully performed.
Type
research article
Authors
Publication date
1999
Published in
Volume
9
Start page
324
End page
331
Note
222
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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