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conference paper
MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008
Workshop on Oxide Electronics 15
Use this identifier to reference this record
Type
conference paper
Authors
Gariglio, S.
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Stucki, N.
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Triscone, J.-M.
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•
•
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Baek, S.-H.
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Eom, C.-B.
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Reiner, J. W.
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Ahn, C. H.
Publication date
2008
Published in
Workshop on Oxide Electronics 15
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009