Loading...
conference paper
Reciprocating Silicon Microtribometer
2003
Reliability, Testing, and Characterization of MEMS/MOEMS II
Type
conference paper
Authors
Publication date
2003
Published in
Reliability, Testing, and Characterization of MEMS/MOEMS II
Series title/Series vol.
SPIE Proceedings; 4980
Start page
163
End page
174
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place |
San Jose, CA, United States | |
Available on Infoscience
May 12, 2009
Use this identifier to reference this record