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conference paper
High-speed electrostatic gas microvalve switching behavior
2001
Microfluidics and BioMEMS
Type
conference paper
Authors
Publication date
2001
Published in
Microfluidics and BioMEMS
Series title/Series vol.
SPIE Proceedings; 4560
Start page
217
End page
226
Note
263
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
San Francisco, CA, United States | 21-25 October 2001 | |
Available on Infoscience
May 12, 2009
Use this identifier to reference this record