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conference paper
Electrostatically actuated gas microvalve based on a Ta-Si-N membrane
2001
14th IEEE International Conference On Micro Electro Mechanical Systems - Technical Digest
Type
conference paper
Authors
Publication date
2001
Published in
14th IEEE International Conference On Micro Electro Mechanical Systems - Technical Digest
Start page
535
End page
538
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record