Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering


Published in:
ICMCTF International Conference on Metallurgical Coatings and Thin Films, 91
Year:
2006
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


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