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conference paper
Fabrication Process of High Aspect Ratio Elastic Structures for Piezoelectric Motor Applications
1997
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Type
conference paper
Authors
Dellmann, L.
•
Roth, S.
•
Beuret, C.
•
Racine, G.-A.
•
Lorenz, H.
•
Despont, M.
•
Renaud, P.
•
Vettiger, P.
•
Publication date
1997
Published in
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Volume
1
Start page
641
End page
644
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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