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conference paper
Micromachined piezoelectric elastic force motor (EFM)
2000
MEMS '00 13th Annual Internat. Conf. on Micro Electro Mechanical Systems
Type
conference paper
Authors
Publication date
2000
Published in
MEMS '00 13th Annual Internat. Conf. on Micro Electro Mechanical Systems
Start page
52
End page
55
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record