Microstructures Study of Pt Thin Film Used in MEMS Fabrication
2003
Details
Title
Microstructures Study of Pt Thin Film Used in MEMS Fabrication
Author(s)
Dadras, M. ; Briand, D. ; de Rooij, N. F.
Published in
BENEFRI Materials Day
Date
2003
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12