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research article
Advanced deep reactive ion etching: a versatile tool for micromechanical systems
Type
research article
Authors
Clerc, P.-A.
•
Dellmann, L.
•
Grétillat, F.
•
Grétillat, M.-A.
•
Indermühle, P.-F.
•
Jeanneret, S.
•
Luginbuhl, Ph.
•
Marxer, C.
•
Pfeffer, T.
•
Racine, G.-A.
Publication date
1998
Published in
Volume
8
Start page
272
End page
278
Note
191
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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