Infoscience

Thesis

Electromechanical Polysilicon Structres and Micromachining.

    Note:

    Jury: A. Shah, H. Baltès (ETHZ), W. Trimmer (Princeton Uni).

    Reference

    • SAMLAB-THESIS-1993-001

    Record created on 2009-05-12, modified on 2016-08-08

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