Electromechanical Polysilicon Structres and Micromachining.


Advisor(s):
de Rooij, N. F.
Year:
1993
Publisher:
Université de Neuchâtel
Note:
Jury: A. Shah, H. Baltès (ETHZ), W. Trimmer (Princeton Uni).
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)