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conference paper
Capacitively Activated Torsional High-Q Resonator
1990
IEEE Micro Electro Mechanical Systems Conference
Type
conference paper
Authors
Publication date
1990
Published in
IEEE Micro Electro Mechanical Systems Conference
Start page
132
End page
135
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record