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conference paper
CAD for Silicon Anisotropic Etching
1990
IEEE Micro Electro Mechanical Systems Conference
Type
conference paper
Authors
Publication date
1990
Published in
IEEE Micro Electro Mechanical Systems Conference
Start page
111
End page
112
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record