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conference paper
From the Mask Layout to the Performance of a Device : A Complete CAD System for Micromachined Monocrystalline Silicon Structure
1990
MME'90 workshop on Micromachining, Micromechanics and Microsystems
Type
conference paper
Authors
Publication date
1990
Published in
MME'90 workshop on Micromachining, Micromechanics and Microsystems
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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