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conference paper
Tuning Forks in Silicon
1989
IEEE Micro-Electro Mechanical Systems
Type
conference paper
Authors
Publication date
1989
Published in
IEEE Micro-Electro Mechanical Systems
Start page
94
End page
95
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record