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conference paper
Integration of the Anisotropic-Silicon-Etching-Program ASEPtm within the CAEMEMStm CAD/CAE Framework
Buser, R.
•
Crary, S. B.
•
Juma, O. S.
1992
MEMS'92
Type
conference paper
Authors
Buser, R.
•
Crary, S. B.
•
Juma, O. S.
Publication date
1992
Published in
MEMS'92
Start page
133
End page
138
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record