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conference paper
Micromachined Silicon Cantilevers and Tips for Bidirectional Force Microscopy
1991
Transducers'91 the 6th Internat. Conf. Solid-State Sensors and Actuators
Type
conference paper
Authors
Publication date
1991
Published in
Transducers'91 the 6th Internat. Conf. Solid-State Sensors and Actuators
Start page
249
End page
252
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record