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conference paper
Monocrystalline Silicon Resonators
Buser, R.
1989
AMA/SVS Seminar Mikromechanik
Type
conference paper
Authors
Buser, R.
Publication date
1989
Published in
AMA/SVS Seminar Mikromechanik
Start page
193
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record