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book part or chapter
Electrostatically Actuated Silicon Micromachined Sensors for Scanning Force Microscopy
Type
book part or chapter
Authors
Publication date
1995
Publisher
Published in
Forces in Scanning Probe Methods
ISBN of the book
94-011-0049-7
Publisher place
Dordrecht
Start page
79
End page
84
Series title/Series vol.
NATO ASI Series; 286
Note
128
EPFL units
Available on Infoscience
May 12, 2009
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