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research article
Microsystems Research and Development at IMT Neuchatel - Scanning Probe Microsystem for Nanotechnology
Type
research article
Authors
Brugger, J.
•
Jaecklin, V. P.
•
Indermühle, P.-F.
•
Linder, C.
Publication date
1993
Published in
Volume
6
Issue
1
Start page
105
Note
94
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record