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book part or chapter
Micromachined Silicon Tools for Nanometer-Scale Science
Type
book part or chapter
Authors
Publication date
1993
Published in
Nanosources and Manipulation of Atoms under High Fields and Temperatures : Applications
Start page
311
End page
317
Series title/Series vol.
NATO ASI Series (Series E: Applied Sciences); 235
Note
96
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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