Silicon Liquid Flow Sensor Encapsulation using Metal to Glass Anodic Bonding
2004
Details
Title
Silicon Liquid Flow Sensor Encapsulation using Metal to Glass Anodic Bonding
Author(s)
Briand, D. ; Weber, P. ; de Rooij, N. F.
Published in
MEMS 2004
Volume
1
Pages
649-652
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12