Micro-hotplates on polyimide for sensors et actuators

• Published in: Sensors and Actuators A, vol. 132, p. 317-324
• Publication date: 2006

Note:

383

Reference

• SAMLAB-ARTICLE-2006-007
• doi:10.1016/j.sna.2006.06.003
• View record in Web of Science

Record created on 2009-05-12, modified on 2016-08-08