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Micro-hotplates on polyimide for sensors et actuators

Briand, D. ; Colin, S. ; Gangadharaiah, A. ; Vela, E.[...]

Published in:
Sensors and Actuators A, 132, 317-324
Year:
2006
Note:
383
DOI:
10.1016/j.sna.2006.06.003
Other identifiers:
View record in Web of Science
DAR: 9769
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published



 Record created 2009-05-12, last modified 2018-03-17


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