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conference paper
Semiconductor Materials: Properties, Technology and Applications
1996
UETP-MEMS FSRM Course: Materials for Microstructures
Type
conference paper
Authors
Publication date
1996
Published in
UETP-MEMS FSRM Course: Materials for Microstructures
Start page
93
End page
120
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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