Microfabrication of 3D Multidirectional Inclined Structures by UV Lithography and Electroplating
1994
Details
Title
Microfabrication of 3D Multidirectional Inclined Structures by UV Lithography and Electroplating
Author(s)
Beuret, C. ; Racine, G.-A. ; Gobet, J. ; Luthier, R. ; de Rooij, N. F.
Published in
IEEE Micro Electro Mechanical Systems
Pages
81-85
Date
1994
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12