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conference paper
Microfabrication of 3D Multidirectional Inclined Structures by UV Lithography and Electroplating
1994
IEEE Micro Electro Mechanical Systems
Type
conference paper
Authors
Publication date
1994
Published in
IEEE Micro Electro Mechanical Systems
Start page
81
End page
85
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record