Microfabricated Scanning Probe Systems for Micro- and Nanoscale Analysis and Structuring of Interfaces
Auger, V.; Akiyama, T.; de Rooij, N. F.; Koudelka-Hep, M.; Campana, F.; Eichenberger, N.; Siegenthaler, H.; Ballesteros Katemann, B.; Schuhmann, W.
2002

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Title Microfabricated Scanning Probe Systems for Micro- and Nanoscale Analysis and Structuring of Interfaces
Author(s) Auger, V. ; Akiyama, T. ; de Rooij, N. F. ; Koudelka-Hep, M. ; Campana, F. ; Eichenberger, N. ; Siegenthaler, H. ; Ballesteros Katemann, B. ; Schuhmann, W.
Published in Twannberg Workshop on Nanoscience
Pages 20
Date 2002
Laboratories SAMLAB
Record Appears in Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
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