Loading...
conference paper
Fabrication and Testing of an Integrated Force Sensor Based on a MOS Transistor for Applications in Scanning Force Microscopy
1997
MEMS'97 IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems
Type
conference paper
Authors
•
Tonin, A.
•
Hidber, H.-R.
•
Brugger, J.
•
Vettiger, P.
•
Staufer, U.
•
Publication date
1997
Published in
MEMS'97 IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems
Start page
141
End page
146
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record