Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy
2003
Abstract
The dynamic mode atomic force microscopy based on a microfabricated cantilever and a commercial quartz tuning fork was probed. The probe was self-sensing and self-actuating. The tuning fork performed the function of a force sensor. The amplitude and frequency of the tuning fork governed the tip vibration, while the cantilever determined the spring constant.
Details
Title
Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy
Author(s)
Akiyama, T. ; Staufer, U. ; de Rooij, N. F. ; Frederix, P. ; Engel, A.
Published in
Review of Scientific Instruments
Volume
74
Issue
1 I
Pages
112-117
Date
2003
ISSN
00346748
Note
296
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12