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conference paper
Microfabricated electrical connector for AFM probes with integrated sensor/actuator
2001
2001 International Microprocesses and Nanotechnology Conference
Type
conference paper
Authors
Publication date
2001
Published in
2001 International Microprocesses and Nanotechnology Conference
Start page
52
End page
53
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record