Development of Insulated Conductive Probes with Platinum Silicide Tips for Atomic Force Microscopy in Cell Biology

A microfabrication process of a multifunctional probe is introduced for atomic force microscopy and various electrochemical measurements on biological samples in buffer solution. The silicon nitride probes have a spring constant lower than 0.1 N/m and a conductive tip, which is tightly insulated except at the apex. The conductive core of the tip consists of PtxSi y and shows a typical radius of curvature of 15 nm. A simultaneous measurement of topography and electrical current on graphite in air was demonstrated.


Published in:
Japanese Journal of Applied Physics, 43, 3865-3867
Year:
2004
Note:
313
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


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