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conference paper
Atomic Force Microscopy with Optical Heterodyne Detection Method
2005
IEEE/LEOS International Conference on Optical MEMS
Type
conference paper
Authors
•
Manzardo, O.
•
Dandliker, R.
•
•
Aeschimann, L.
•
Staufer, U.
•
Vettiger, P.
•
Lee, J.-H.
Publication date
2005
Published in
IEEE/LEOS International Conference on Optical MEMS
Start page
173
End page
174
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
April 22, 2009
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