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Metrology of refractive microlens arrays

Weible, K. J. ; Völkel, R. ; Eisner, M. ; Hoffmann, S.[...]

Published in:
Optical Micro- and Nanometrology in Manufacturing Tecnology, 43-51
Year:
2004
Publisher:
SPIE-The International Society for Optical Engineering, Bellingham, USA
Laboratories:
OPT

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-04-22, last modified 2018-09-13


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