Metrology of refractive microlens arrays
2004
Details
Title
Metrology of refractive microlens arrays
Author(s)
Weible, K. J. ; Völkel, R. ; Eisner, M. ; Hoffmann, S. ; Scharf, T. ; Herzig, H. P.
Published in
Optical Micro- and Nanometrology in Manufacturing Tecnology
Series
Proc. SPIE, 5458
Pages
43-51
Date
2004
Publisher
SPIE-The International Society for Optical Engineering, Bellingham, USA
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22