Infoscience

Conference paper

Metrology of refractive microlens arrays

Weible, K. J.; Völkel, R.; Eisner, M.; Hoffmann, S.; Scharf, T.; Herzig, H. P.
  • Published in: Optical Micro- and Nanometrology in Manufacturing Tecnology, p. 43-51
  • Series: Proc. SPIE Volume 5458
  • SPIE-The International Society for Optical Engineering, Bellingham, USA, 2004

    Reference

    • OPT-CONF-2004-027

    Record created on 2009-04-22, modified on 2017-05-10

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