Periodic structures with arbitrary shapes recorded by multiple beam interference
2003
Details
Title
Periodic structures with arbitrary shapes recorded by multiple beam interference
Author(s)
Weiteneder, C. ; Klaus, W. ; Herzig, H. P.
Published in
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Series
Proc. SPIE, 5183
Pages
32-39
Date
2003
Publisher
SPIE-The International Society for Optical Engineering, Bellingham, USA
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22