Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics
2002
Details
Title
Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics
Author(s)
Noell, W. ; Sun, W. ; de Rooij, N. F. ; Herzig, H. P. ; Manzardo, O. ; Dändliker, R.
Published in
LEOS 2002 IEEE Annual Meeting Conference Proceedings
Volume
2
Pages
580-581
Date
2002
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22