Optical microelectromechanical systems (OMEMS) based on silicon-on-insulator (SOI) technology


Published in:
Diffractive Optics and Micro-Optics, 114-116
Presented at:
Diffractive Optics and Micro-Optics 2002, Tucson, Arizona, USA, 3–6 June 2002
Year:
2002
Publisher:
Washington, DC, USA, Optical Society of America
ISBN:
1-55752-710-5
Laboratories:




 Record created 2009-04-22, last modified 2018-09-13


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