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conference paper
New lithographic techniques using microlens arrays
1997
Microlens Arrays
Type
conference paper
Authors
Völkel, R.
•
•
Nussbaum, Ph.
•
Blattner, P.
•
•
Cullmann, E.
•
Hugle, W.B.
Publication date
1997
Publisher
Published in
Microlens Arrays
Series title/Series vol.
EOS Topical Meetings Digest Series; 13
Start page
105
End page
109
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record