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conference paper
Refractive and diffractive elements for micro-optical systems
1997
Microelectronic Structures and MEMS for Optical Processing III
Type
conference paper
Authors
Publication date
1997
Published in
Microelectronic Structures and MEMS for Optical Processing III
Series title/Series vol.
Proc. SPIE; 3226
Start page
32
End page
43
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record