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research article
Monolithically integrated optical displacement sensor in GaAs/AlGaAs
1995
A monolithically integrated displacement sensor has been fabricated in the GaAs/AlGaAs material system. The device is configured as a Michelson interferometer and consists of a DBR laser, a directional coupler, transparent waveguides and a photodetector. Interference fringes could be seen at a measurement distance of up to 45cm, requiring only the alignment of an external GRIN lens for beam collimation.
Type
research article
Authors
Publication date
1995
Published in
Volume
31
Start page
2121
End page
2122
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
April 22, 2009
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