Details
Title
Microlens arrays for optical lithography
Author(s)
Völkel, R. ; Nussbaum, Ph. ; Herzig, H. P. ; Hugle, W.B.
Published in
Microlens Arrays
Series
EOS Topical Meetings Digest Series
Volume
5
Pages
100-105
Date
1995
Publisher
European Optical Society, Paris
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-04-22