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conference paper
Dimensional profiling by electronic phase measurement
1987
Industrial Laser Interferometry, Los Angeles
Type
conference paper
Authors
Publication date
1987
Published in
Industrial Laser Interferometry, Los Angeles
Series title/Series vol.
Proc. SPIE; 746
Start page
61
End page
68
EPFL units
Available on Infoscience
April 22, 2009
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