Loading...
master thesis
Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.
Mitrev, Pande
2003
Type
master thesis
Authors
Mitrev, Pande
Publication date
2003
Subjects
Note
EPFL / Ioffe Physico-Technical Institute St. Petersburg
EPFL units
Available on Infoscience
March 17, 2009
Use this identifier to reference this record