Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.

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Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.

Mitrev, Pande

2003

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Title Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.

Author(s) Mitrev, Pande

Date 2003

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Note EPFL / Ioffe Physico-Technical Institute St. Petersburg

Laboratories LOA

Record Appears in Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LOA - Advanced Photonics Laboratory
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