Home > Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.
 

Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.

Mitrev, Pande

Year:
2003
Keywords:
[NRG]
Note:
EPFL / Ioffe Physico-Technical Institute St. Petersburg
Laboratories:
LOA

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LOA - Advanced Photonics Laboratory
Work produced at EPFL
Student projects
Published



 Record created 2009-03-17, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
4
5
 
(Not yet reviewed)