Infoscience

Student project

Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.

Mitrev, Pande
  • Publication date: 2003

    Keywords: [NRG]

    Note:

    EPFL / Ioffe Physico-Technical Institute St. Petersburg

    Reference

    • LOA-STUDENT-2009-020

    Record created on 2009-03-17, modified on 2017-05-10

Fulltext

  • There is no available fulltext. Please contact the lab or the authors.

Related material

Contacts