Infoscience

Student project

Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.

    Keywords: [NRG]

    Note:

    EPFL / Ioffe Physico-Technical Institute St. Petersburg

    Reference

    • LOA-STUDENT-2009-020

    Record created on 2009-03-17, modified on 2016-08-08

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