Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.
2003
Details
Title
Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.
Author(s)
Mitrev, Pande
Date
2003
Keywords
Note
EPFL / Ioffe Physico-Technical Institute St. Petersburg
Laboratories
LOA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Work produced at EPFL
Student projects
Work produced at EPFL
Student projects
Work type
Diploma work
Record creation date
2009-03-17