Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.
2003
Details
Title
Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.
Author(s)
Mitrev, Pande
Date
2003
Keywords
Note
EPFL / Ioffe Physico-Technical Institute St. Petersburg
Laboratories
LOA